Wafer/Reticle Handling

200 mm Wafer Handling

Wide selection of products and services designed to address the automation, contamination and productivity concerns of today's 200 mm fabs.

150 mm Wafer Handling

To support the semiconductor industry's requirements for advanced 150 mm wafer handling, Entegris offers a variety of wafer shipping and handling solutions to safely transport silicon wafers in today's 150 mm fabs.

125 mm and smaller Wafer Handling

Broad offering of 125 mm and smaller wafer handling products to safely transport and protect silicon wafers.

Solar/LCD Carriers, Other Carriers and Labware

Variety of carriers, baskets, handles and labware for many silicon wafer handling needs.

Mask and Reticle Handling

Variety of products for handling masks and reticles of various sizes.

Reticle Smif Pods

An array of Reticle SMIF Pods designed to protect, store and transport valuable lithography reticles. Entegris reticle pods offer users the advantages of a cost-effective design combined with an extremely high degree of contamination protection.